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Reliability study of TaON capacitors: From leakage current characterization to ESD robustness prediction

M. Verchiani, E. Bouyssou, G. Fiannaca, F. Cantin, C. Anceau, P. Ranson. Reliability study of TaON capacitors: From leakage current characterization to ESD robustness prediction. Microelectronics Reliability, 48(8-9):1412-1416, 2008. [doi]

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M. Verchiani

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E. Bouyssou

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G. Fiannaca

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F. Cantin

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C. Anceau

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P. Ranson

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