Reliability study of TaON capacitors: From leakage current characterization to ESD robustness prediction

M. Verchiani, E. Bouyssou, G. Fiannaca, F. Cantin, C. Anceau, P. Ranson. Reliability study of TaON capacitors: From leakage current characterization to ESD robustness prediction. Microelectronics Reliability, 48(8-9):1412-1416, 2008. [doi]

Abstract

Abstract is missing.