A Surface-Micromachined Levitating MEMS Speaker

Antoine Verreault, Paul-Vahé Cicek, Alexandre Robichaud. A Surface-Micromachined Levitating MEMS Speaker. In 20th IEEE Interregional NEWCAS Conference, NEWCAS 2022, Quebec City, QC, Canada, June 19-22, 2022. pages 134-138, IEEE, 2022. [doi]

Authors

Antoine Verreault

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Paul-Vahé Cicek

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Alexandre Robichaud

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