Antoine Verreault, Paul-Vahé Cicek, Alexandre Robichaud. A Surface-Micromachined Levitating MEMS Speaker. In 20th IEEE Interregional NEWCAS Conference, NEWCAS 2022, Quebec City, QC, Canada, June 19-22, 2022. pages 134-138, IEEE, 2022. [doi]
Abstract is missing.