A Surface-Micromachined Levitating MEMS Speaker

Antoine Verreault, Paul-Vahé Cicek, Alexandre Robichaud. A Surface-Micromachined Levitating MEMS Speaker. In 20th IEEE Interregional NEWCAS Conference, NEWCAS 2022, Quebec City, QC, Canada, June 19-22, 2022. pages 134-138, IEEE, 2022. [doi]

@inproceedings{VerreaultCR22,
  title = {A Surface-Micromachined Levitating MEMS Speaker},
  author = {Antoine Verreault and Paul-Vahé Cicek and Alexandre Robichaud},
  year = {2022},
  doi = {10.1109/NEWCAS52662.2022.9842083},
  url = {https://doi.org/10.1109/NEWCAS52662.2022.9842083},
  researchr = {https://researchr.org/publication/VerreaultCR22},
  cites = {0},
  citedby = {0},
  pages = {134-138},
  booktitle = {20th IEEE Interregional NEWCAS Conference, NEWCAS 2022, Quebec City, QC, Canada, June 19-22, 2022},
  publisher = {IEEE},
  isbn = {978-1-6654-0105-0},
}