Lithography aware critical area estimation and yield analysis

Priyamvada Vijayakumar, Vikram B. Suresh, Sandip Kundu. Lithography aware critical area estimation and yield analysis. In Bill Eklow, R. D. (Shawn) Blanton, editors, 2011 IEEE International Test Conference, ITC 2011, Anaheim, CA, USA, September 20-22, 2011. pages 1-8, IEEE, 2011. [doi]

Abstract

Abstract is missing.