Luis Guillermo Villanueva, Oscar Vazquez-Mena, Cristina Martin-Olmos, Veronica Savu, Katrin Sidler, Juergen Brugger. Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography. Micromachines, 4(4):370-377, 2013. [doi]
@article{VillanuevaVMSSB13,
title = {Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography},
author = {Luis Guillermo Villanueva and Oscar Vazquez-Mena and Cristina Martin-Olmos and Veronica Savu and Katrin Sidler and Juergen Brugger},
year = {2013},
doi = {10.3390/mi4040370},
url = {http://dx.doi.org/10.3390/mi4040370},
researchr = {https://researchr.org/publication/VillanuevaVMSSB13},
cites = {0},
citedby = {0},
journal = {Micromachines},
volume = {4},
number = {4},
pages = {370-377},
}