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Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography

Luis Guillermo Villanueva, Oscar Vazquez-Mena, Cristina Martin-Olmos, Veronica Savu, Katrin Sidler, Juergen Brugger. Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography. Micromachines, 4(4):370-377, 2013. [doi]

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