Luis Guillermo Villanueva, Oscar Vazquez-Mena, Cristina Martin-Olmos, Veronica Savu, Katrin Sidler, Juergen Brugger. Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography. Micromachines, 4(4):370-377, 2013. [doi]
Abstract is missing.