Trilayer nanoimprint fabrication and simulation of the silicon nanowire sensor for gas detection

Jing Wan, Shao-Ren Deng, Yifang Chen, Ejaz Huq, Ran Liu, Xin-Ping Qu. Trilayer nanoimprint fabrication and simulation of the silicon nanowire sensor for gas detection. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 1013-1016, IEEE, 2009. [doi]

Abstract

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