Study on the Hierarchical Predictive Control of Semiconductor Silicon Single Crystal Quality Based on the Soft Sensor Model

Yin Wan, Ding Liu, Jun-Chao Ren, Shi-Hai Wu. Study on the Hierarchical Predictive Control of Semiconductor Silicon Single Crystal Quality Based on the Soft Sensor Model. Sensors, 23(5):2830, March 2023. [doi]

Abstract

Abstract is missing.