Liping Wang, Andrew R. Brown, Binjie Cheng, Asen Asenov. Analytical Models for Three-Dimensional Ion Implantation Profiles in FinFETs. IEEE Trans. on CAD of Integrated Circuits and Systems, 32(12):2004-2008, 2013. [doi]
@article{WangBCA13,
title = {Analytical Models for Three-Dimensional Ion Implantation Profiles in FinFETs},
author = {Liping Wang and Andrew R. Brown and Binjie Cheng and Asen Asenov},
year = {2013},
doi = {10.1109/TCAD.2013.2277975},
url = {http://dx.doi.org/10.1109/TCAD.2013.2277975},
researchr = {https://researchr.org/publication/WangBCA13},
cites = {0},
citedby = {0},
journal = {IEEE Trans. on CAD of Integrated Circuits and Systems},
volume = {32},
number = {12},
pages = {2004-2008},
}