Analytical Models for Three-Dimensional Ion Implantation Profiles in FinFETs

Liping Wang, Andrew R. Brown, Binjie Cheng, Asen Asenov. Analytical Models for Three-Dimensional Ion Implantation Profiles in FinFETs. IEEE Trans. on CAD of Integrated Circuits and Systems, 32(12):2004-2008, 2013. [doi]

Abstract

Abstract is missing.