Diffusion barrier performance of Zr-N/Zr bilayered film in Cu/Si contact system

Ying Wang, Fei Cao, Minghui Ding, Yun-tao Liu. Diffusion barrier performance of Zr-N/Zr bilayered film in Cu/Si contact system. Microelectronics Reliability, 48(11-12):1800-1803, 2008. [doi]

Authors

Ying Wang

This author has not been identified. Look up 'Ying Wang' in Google

Fei Cao

This author has not been identified. Look up 'Fei Cao' in Google

Minghui Ding

This author has not been identified. Look up 'Minghui Ding' in Google

Yun-tao Liu

This author has not been identified. Look up 'Yun-tao Liu' in Google