Diffusion barrier performance of Zr-N/Zr bilayered film in Cu/Si contact system

Ying Wang, Fei Cao, Minghui Ding, Yun-tao Liu. Diffusion barrier performance of Zr-N/Zr bilayered film in Cu/Si contact system. Microelectronics Reliability, 48(11-12):1800-1803, 2008. [doi]

Abstract

Abstract is missing.