Robust control of a long-stroke precision stage: With applications to fresnel zone plane fabrication - researchr publication authors

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K. A. Wang, Y. Y. Chen, F. C. Wang. Robust control of a long-stroke precision stage: With applications to fresnel zone plane fabrication. In 2015 IEEE/SICE International Symposium on System Integration, SII 2015, Nagoya, Japan, December 11-13, 2015. pages 229-234, IEEE, 2015. [doi]

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