Robust control of a long-stroke precision stage: With applications to fresnel zone plane fabrication

K. A. Wang, Y. Y. Chen, F. C. Wang. Robust control of a long-stroke precision stage: With applications to fresnel zone plane fabrication. In 2015 IEEE/SICE International Symposium on System Integration, SII 2015, Nagoya, Japan, December 11-13, 2015. pages 229-234, IEEE, 2015. [doi]

@inproceedings{WangCW15-9,
  title = {Robust control of a long-stroke precision stage: With applications to fresnel zone plane fabrication},
  author = {K. A. Wang and Y. Y. Chen and F. C. Wang},
  year = {2015},
  doi = {10.1109/SII.2015.7404983},
  url = {http://dx.doi.org/10.1109/SII.2015.7404983},
  researchr = {https://researchr.org/publication/WangCW15-9},
  cites = {0},
  citedby = {0},
  pages = {229-234},
  booktitle = {2015 IEEE/SICE International Symposium on System Integration, SII 2015, Nagoya, Japan, December 11-13, 2015},
  publisher = {IEEE},
  isbn = {978-1-4673-7242-8},
}