Investigation on LIGA-like process based on multilevel imprint lithography

Quandai Wang, Yugang Duan, Yucheng Ding, Bingheng Lu, Jiawei Xiang, Lianfa Yang. Investigation on LIGA-like process based on multilevel imprint lithography. Microelectronics Journal, 40(1):149-155, 2009. [doi]

Authors

Quandai Wang

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Yugang Duan

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Yucheng Ding

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Bingheng Lu

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Jiawei Xiang

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Lianfa Yang

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