Knowledge augmented broad learning system for computer vision based mixed-type defect detection in semiconductor manufacturing

Junliang Wang, Pengjie Gao, Jie Zhang, Chao Lu, Bo Shen. Knowledge augmented broad learning system for computer vision based mixed-type defect detection in semiconductor manufacturing. Robotics Comput. Integr. Manuf., 81:102513, June 2023. [doi]

Abstract

Abstract is missing.