Shengkai Wang, Jilong Hao, Nannan You, Yun Bai, Xinyu Liu. Rapid Growth of SiO2 on SiC with Low Ditusing High Pressure Microwave Oxygen Plasma. In 13th IEEE International Conference on ASIC, ASICON 2019, Chongqing, China, October 29 - November 1, 2019. pages 1-4, IEEE, 2019. [doi]
Abstract is missing.