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Optimal Cyclic Scheduling of Wafer-Residency-Time-Constrained Dual-Arm Cluster Tools by Configuring Processing Modules and Adjusting Robot Waiting Time

Jufeng Wang, Tingting Leng, Chunfeng Liu 0003, MengChu Zhou. Optimal Cyclic Scheduling of Wafer-Residency-Time-Constrained Dual-Arm Cluster Tools by Configuring Processing Modules and Adjusting Robot Waiting Time. In 19th IEEE International Conference on Automation Science and Engineering, CASE 2023, Auckland, New Zealand, August 26-30, 2023. pages 1-6, IEEE, 2023. [doi]

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