Design and Analysis of a Novel XY Micro-positioning Stage Used Corrugated Flexure Beams

Nianfeng Wang, Xiaohe Liang, Xianmin Zhang. Design and Analysis of a Novel XY Micro-positioning Stage Used Corrugated Flexure Beams. In Xianmin Zhang, Honghai Liu, Zhong Chen, Nianfeng Wang, editors, Intelligent Robotics and Applications - 7th International Conference, ICIRA 2014, Guangzhou, China, December 17-20, 2014, Proceedings, Part II. Volume 8918 of Lecture Notes in Computer Science, pages 586-595, Springer, 2014. [doi]

Abstract

Abstract is missing.