A Wafer-Level Vacuum Packaged MEMS Disk Resonator Gyroscope With 0.42°/h Bias Instability Within ±300°/s Full Scale

Hao Wang, Haiyang Quan, Jinqiu Zhou, Long Zhang, Jianbing Xie, Honglong Chang. A Wafer-Level Vacuum Packaged MEMS Disk Resonator Gyroscope With 0.42°/h Bias Instability Within ±300°/s Full Scale. IEEE Transactions on Industrial Electronics, 69(5):5304-5313, 2022. [doi]

Authors

Hao Wang

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Haiyang Quan

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Jinqiu Zhou

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Long Zhang

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Jianbing Xie

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Honglong Chang

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