Hao Wang, Haiyang Quan, Jinqiu Zhou, Long Zhang, Jianbing Xie, Honglong Chang. A Wafer-Level Vacuum Packaged MEMS Disk Resonator Gyroscope With 0.42°/h Bias Instability Within ±300°/s Full Scale. IEEE Transactions on Industrial Electronics, 69(5):5304-5313, 2022. [doi]
@article{WangQZZXC22,
title = {A Wafer-Level Vacuum Packaged MEMS Disk Resonator Gyroscope With 0.42°/h Bias Instability Within ±300°/s Full Scale},
author = {Hao Wang and Haiyang Quan and Jinqiu Zhou and Long Zhang and Jianbing Xie and Honglong Chang},
year = {2022},
doi = {10.1109/TIE.2021.3078375},
url = {https://doi.org/10.1109/TIE.2021.3078375},
researchr = {https://researchr.org/publication/WangQZZXC22},
cites = {0},
citedby = {0},
journal = {IEEE Transactions on Industrial Electronics},
volume = {69},
number = {5},
pages = {5304-5313},
}