Hao Wang, Haiyang Quan, Jinqiu Zhou, Long Zhang, Jianbing Xie, Honglong Chang. A Wafer-Level Vacuum Packaged MEMS Disk Resonator Gyroscope With 0.42°/h Bias Instability Within ±300°/s Full Scale. IEEE Transactions on Industrial Electronics, 69(5):5304-5313, 2022. [doi]
Abstract is missing.