Jiachou Wang, Lining Sun, Weibin Rong, Xinxin Li. A Vertical Sidewall Surface Piezoresistor Technology Based on DRIE and Its Typical Application in Micro xy-Stages. In Caihua Xiong, Honghai Liu, Yongan Huang, Youlun Xiong, editors, Intelligent Robotics and Applications, First International Conference, ICIRA 2008, Wuhan, China, October 15-17, 2008 Proceedings, Part II. Volume 5315 of Lecture Notes in Computer Science, pages 170-177, Springer, 2008. [doi]
Abstract is missing.