Analysis and Compensation of Benchmark Drift of Micromachined Thermal Wind Sensor Caused by Packaging Asymmetry

Zhenjun Wang, Zhenxiang Yi, Run Tian, Ming Qin, Qing-An Huang, Zai-Fa Zhou, Kevin Long. Analysis and Compensation of Benchmark Drift of Micromachined Thermal Wind Sensor Caused by Packaging Asymmetry. IEEE Transactions on Industrial Electronics, 69(1):950-959, 2022. [doi]

Abstract

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