Research on micro-electro-mechanical system computer aided design

Xiaoyu Wang, Linghui Yu, Song Xie. Research on micro-electro-mechanical system computer aided design. In International Conference on Electronic and Mechanical Engineering and Information Technology, EMEIT 2011, Harbin, Heilongjiang, China, 12-14 August, 2011. pages 1556-1559, IEEE, 2011. [doi]

Abstract

Abstract is missing.