A silicon-on-glass Z-axis accelerometer with vertical sensing comb capacitors - researchr publication authors

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Jiankun Wang, Zhenchuan Yang, Guizhen Yan. A silicon-on-glass Z-axis accelerometer with vertical sensing comb capacitors. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 583-586, IEEE, 2012. [doi]

This author has not been identified. Look up 'Jiankun Wang' in GoogleThis author has not been identified. Look up 'Zhenchuan Yang' in GoogleThis author has not been identified. Look up 'Guizhen Yan' in Google

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