Jiankun Wang, Zhenchuan Yang, Guizhen Yan. A silicon-on-glass Z-axis accelerometer with vertical sensing comb capacitors. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 583-586, IEEE, 2012. [doi]
@inproceedings{WangYY12-0,
title = {A silicon-on-glass Z-axis accelerometer with vertical sensing comb capacitors},
author = {Jiankun Wang and Zhenchuan Yang and Guizhen Yan},
year = {2012},
doi = {10.1109/NEMS.2012.6196843},
url = {http://dx.doi.org/10.1109/NEMS.2012.6196843},
researchr = {https://researchr.org/publication/WangYY12-0},
cites = {0},
citedby = {0},
pages = {583-586},
booktitle = {7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012},
publisher = {IEEE},
isbn = {978-1-4673-1122-9},
}