Jiankun Wang, Zhenchuan Yang, Guizhen Yan. A silicon-on-glass Z-axis accelerometer with vertical sensing comb capacitors. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 583-586, IEEE, 2012. [doi]
Abstract is missing.