Fabrication of 128×128 element optical switch array by micromachining technology

S. B. Wang, S. B. Zhou, G. Huang, B. F. Xiong, S. H. Chen, X. J. Yi. Fabrication of 128×128 element optical switch array by micromachining technology. Microelectronics Journal, 36(1):91-95, 2005. [doi]

Abstract

Abstract is missing.