Noise Suppression and Disturbance Rejection Control for Piezo-Actuated Nanopositioning Stages

Xinyu Wang, Jianying Zheng, Dongyu Li, Fei Dong, Jianpeng Zhong, Qinglei Hu. Noise Suppression and Disturbance Rejection Control for Piezo-Actuated Nanopositioning Stages. In 11th International Conference on Control, Mechatronics and Automation, ICCMA 2023, Grimstad, Norway, November 1-3, 2023. pages 439-444, IEEE, 2023. [doi]

Abstract

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