Hillocks and hexagonal pits in a thick film grown by HVPE

T. B. Wei, R. F. Duan, J. X. Wang, J. M. Li, Z. Q. Huo, Y. P. Zeng. Hillocks and hexagonal pits in a thick film grown by HVPE. Microelectronics Journal, 39(12):1556-1559, 2008. [doi]

Abstract

Abstract is missing.