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Enablement of CMOS integrated sensor, harvesting and storage applications by ferroelectric HfO2

Wenke Weinreich, Maximilian Lederer, Malte Czernohorsky. Enablement of CMOS integrated sensor, harvesting and storage applications by ferroelectric HfO2. In International Conference on IC Design and Technology, ICICDT 2022, Hanoi, Vietnam, September 21-23, 2022. pages 84-87, IEEE, 2022. [doi]

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