Intelligent Design of Diagnosable Systems: A Case Study of Semiconductor Manufacturing Machines

YuanLin Wen, Sheng-Luen Chung, Li-Der Jeng, MuDer Jeng. Intelligent Design of Diagnosable Systems: A Case Study of Semiconductor Manufacturing Machines. In Bruno Apolloni, Robert J. Howlett, Lakhmi C. Jain, editors, Knowledge-Based Intelligent Information and Engineering Systems, 11th International Conference, KES 2007, XVII Italian Workshop on Neural Networks, Vietri sul Mare, Italy, September 12-14, 2007. Proceedings, Part II. Volume 4693 of Lecture Notes in Computer Science, pages 877-884, Springer, 2007. [doi]

Authors

YuanLin Wen

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Sheng-Luen Chung

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Li-Der Jeng

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MuDer Jeng

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