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Micro-/Nano-Integration for MEMS based on nano-robotic assembly

Thomas Wich, Manuel Mikczinski, Sergej Fatikow. Micro-/Nano-Integration for MEMS based on nano-robotic assembly. In ISR/ROBOTIK 2010, Proceedings for the joint conference of ISR 2010 (41st Internationel Symposium on Robotics) und ROBOTIK 2010 (6th German Conference on Robotics), 7-9 June 2010, Munich, Germany - Parallel to AUTOMATICA. pages 1-8, VDE Verlag, 2010. [doi]

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Thomas Wich

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Manuel Mikczinski

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Sergej Fatikow

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