Thomas Wich, Manuel Mikczinski, Sergej Fatikow. Micro-/Nano-Integration for MEMS based on nano-robotic assembly. In ISR/ROBOTIK 2010, Proceedings for the joint conference of ISR 2010 (41st Internationel Symposium on Robotics) und ROBOTIK 2010 (6th German Conference on Robotics), 7-9 June 2010, Munich, Germany - Parallel to AUTOMATICA. pages 1-8, VDE Verlag, 2010. [doi]
@inproceedings{WichWMFF10, title = {Micro-/Nano-Integration for MEMS based on nano-robotic assembly}, author = {Thomas Wich and Manuel Mikczinski and Sergej Fatikow}, year = {2010}, url = {http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5756923}, tags = {rule-based}, researchr = {https://researchr.org/publication/WichWMFF10}, cites = {0}, citedby = {0}, pages = {1-8}, booktitle = {ISR/ROBOTIK 2010, Proceedings for the joint conference of ISR 2010 (41st Internationel Symposium on Robotics) und ROBOTIK 2010 (6th German Conference on Robotics), 7-9 June 2010, Munich, Germany - Parallel to AUTOMATICA}, publisher = {VDE Verlag}, isbn = {978-3-8007-3273-9}, }