A Flexible and Inherently Self-Consistent Methodology for MOL/BEOL/MIMCAP TDDB Applications with Excessive Variability-Induced Degradation

Ernest Y. Wu, Ron Bolam, Baozhen Li, Tian Shen, Barry P. Linder, Griselda Bonilla, Miaomiao Wang, Dechao Guo. A Flexible and Inherently Self-Consistent Methodology for MOL/BEOL/MIMCAP TDDB Applications with Excessive Variability-Induced Degradation. In IEEE International Reliability Physics Symposium, IRPS 2022, Dallas, TX, USA, March 27-31, 2022. pages 2, IEEE, 2022. [doi]

@inproceedings{WuBLSLBWG22,
  title = {A Flexible and Inherently Self-Consistent Methodology for MOL/BEOL/MIMCAP TDDB Applications with Excessive Variability-Induced Degradation},
  author = {Ernest Y. Wu and Ron Bolam and Baozhen Li and Tian Shen and Barry P. Linder and Griselda Bonilla and Miaomiao Wang and Dechao Guo},
  year = {2022},
  doi = {10.1109/IRPS48227.2022.9764541},
  url = {https://doi.org/10.1109/IRPS48227.2022.9764541},
  researchr = {https://researchr.org/publication/WuBLSLBWG22},
  cites = {0},
  citedby = {0},
  pages = {2},
  booktitle = {IEEE International Reliability Physics Symposium, IRPS 2022, Dallas, TX, USA, March 27-31, 2022},
  publisher = {IEEE},
  isbn = {978-1-6654-7950-9},
}