Petri net-based cycle time analysis of dual-arm cluster tools with wafer revisiting and swapping strategy - researchr publication authors

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Naiqi Wu, Feng Chu, Chengbin Chu, MengChu Zhou. Petri net-based cycle time analysis of dual-arm cluster tools with wafer revisiting and swapping strategy. In IEEE International Conference on Robotics and Automation, ICRA 2011, Shanghai, China, 9-13 May 2011. pages 5499-5504, IEEE, 2011. [doi]

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