Naiqi Wu, Feng Chu, Chengbin Chu, MengChu Zhou. Petri net-based cycle time analysis of dual-arm cluster tools with wafer revisiting and swapping strategy. In IEEE International Conference on Robotics and Automation, ICRA 2011, Shanghai, China, 9-13 May 2011. pages 5499-5504, IEEE, 2011. [doi]
Abstract is missing.