Petri Net Modeling and Cycle-Time Analysis of Dual-Arm Cluster Tools With Wafer Revisiting

Naiqi Wu, Feng Chu, Chengbin Chu, MengChu Zhou. Petri Net Modeling and Cycle-Time Analysis of Dual-Arm Cluster Tools With Wafer Revisiting. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 43(1):196-207, 2013. [doi]

Authors

Naiqi Wu

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Feng Chu

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Chengbin Chu

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MengChu Zhou

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