Naiqi Wu, Feng Chu, Chengbin Chu, MengChu Zhou. Petri Net Modeling and Cycle-Time Analysis of Dual-Arm Cluster Tools With Wafer Revisiting. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 43(1):196-207, 2013. [doi]
@article{WuCCZ13,
title = {Petri Net Modeling and Cycle-Time Analysis of Dual-Arm Cluster Tools With Wafer Revisiting},
author = {Naiqi Wu and Feng Chu and Chengbin Chu and MengChu Zhou},
year = {2013},
doi = {10.1109/TSMCA.2012.2187890},
url = {http://dx.doi.org/10.1109/TSMCA.2012.2187890},
researchr = {https://researchr.org/publication/WuCCZ13},
cites = {0},
citedby = {0},
journal = {IEEE Transactions on Systems, Man, and Cybernetics, Part A},
volume = {43},
number = {1},
pages = {196-207},
}