Detecting and Scoring Equipment Faults in Real Time During Semiconductor Test Processes

Yi-Hsin Wu, Jui-Yu Huang, Yi-Chun Yao, Yin-Jing Tien, Cheng-Juei Yu, Sheng-De Wang. Detecting and Scoring Equipment Faults in Real Time During Semiconductor Test Processes. IEEE Design & Test of Computers, 38(4):119-126, 2021. [doi]

Abstract

Abstract is missing.