Fabrication of compact collateral silicon nanowires based on continuously alternating deposition - researchr publication related

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D. Wu, H. Y. Mao, W. G. Wu. Fabrication of compact collateral silicon nanowires based on continuously alternating deposition. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 601-604, IEEE, 2009. [doi]

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