An ADRC-based CZ Silicon Single Crystal Growth Control Technology - researchr publication authors

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Zhiguo Wu, Lizhong Shui, Shuguang Liu, Zijian Wang. An ADRC-based CZ Silicon Single Crystal Growth Control Technology. In Proceedings of the 2nd International Conference on Control and Intelligent Robotics, ICCIR 2022, Nanjing, China, June 24-26, 2022. pages 508-512, ACM, 2022. [doi]

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