Zhiguo Wu, Lizhong Shui, Shuguang Liu, Zijian Wang. An ADRC-based CZ Silicon Single Crystal Growth Control Technology. In Proceedings of the 2nd International Conference on Control and Intelligent Robotics, ICCIR 2022, Nanjing, China, June 24-26, 2022. pages 508-512, ACM, 2022. [doi]
@inproceedings{WuSLW22-2,
title = {An ADRC-based CZ Silicon Single Crystal Growth Control Technology},
author = {Zhiguo Wu and Lizhong Shui and Shuguang Liu and Zijian Wang},
year = {2022},
doi = {10.1145/3548608.3559253},
url = {https://doi.org/10.1145/3548608.3559253},
researchr = {https://researchr.org/publication/WuSLW22-2},
cites = {0},
citedby = {0},
pages = {508-512},
booktitle = {Proceedings of the 2nd International Conference on Control and Intelligent Robotics, ICCIR 2022, Nanjing, China, June 24-26, 2022},
publisher = {ACM},
isbn = {978-1-4503-9717-9},
}