Zhiguo Wu, Lizhong Shui, Shuguang Liu, Zijian Wang. An ADRC-based CZ Silicon Single Crystal Growth Control Technology. In Proceedings of the 2nd International Conference on Control and Intelligent Robotics, ICCIR 2022, Nanjing, China, June 24-26, 2022. pages 508-512, ACM, 2022. [doi]
Abstract is missing.