Design and optimization of a compact XY parallel micro/nano-positioning stage with stacked structure

Zeyi Wu, Qingsong Xu. Design and optimization of a compact XY parallel micro/nano-positioning stage with stacked structure. In 2017 2nd International Conference on Advanced Robotics and Mechatronics (ICARM), Hefei and Tai'an, China, August 27-31, 2017. pages 558-563, IEEE, 2017. [doi]

Abstract

Abstract is missing.