Design of a Novel Piezo-Driven XYZ Compliant Parallel Micro/Nano-Positioning Stage

Zeyi Wu, Qingsong Xu. Design of a Novel Piezo-Driven XYZ Compliant Parallel Micro/Nano-Positioning Stage. In IEEE International Conference on Robotics and Biomimetics, ROBIO 2018, Kuala Lumpur, Malaysia, December 12-15, 2018. pages 1496-1501, IEEE, 2018. [doi]

Abstract

Abstract is missing.